Preparation method of information recording media
专利汇可以提供Preparation method of information recording media专利检索，专利查询，专利分析的服务。并且PURPOSE:To produce the information recording medium of high performance by etching a substrate by the use of active gasseous chemical species with the metal thin film provided on the substrate and carrying information as a mask then covering the surface thereof with a metal layer of high reflectance. CONSTITUTION:The Al layer 6 of about 400Angstrom in thickness provided on a glass plate (substrate) 1 is selectively cut by using modulated laser light 4 to constitue spiral information tracks of about 0.8mu in width and 1.6mu in pitch to form pits (Fig. A, B). Next, with the Al layer 6 having been produced with the abovementioned pits as a mask, the glass plate 1 is etched by using active gasseous chemical species to make the depth about 1200 to 1100Angstrom (Fig. C), thence a metal layer 13 such as Cr is deposited to about thickness 600Angstrom on the surface of the glass plate 1 (Fig.E). It is desirable to perform the process of the abovementioned Fig. C by using a parallel electrode type dry etching apparatus and the gasseous chemical species obtained by applying high frequency voltage to gas such as S3F8 under vacuum of about 10 torr.，下面是Preparation method of information recording media专利的具体信息内容。
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