| 序号 | 专利名 | 申请号 | 申请日 | 公开（公告）号 | 公开（公告）日 | 发明人 |
|---|---|---|---|---|---|---|
| 281 | Low profile in line cryogenic water pump | US915036 | 1997-08-20 | US5887438A | 1999-03-30 | Joseph P. Johnson; Stephen R. Matte ; Doug F. Aitken; Mark Clemons |
| A cold trap includes a fluid conduit having a fluid flow path therethrough, a length along the fluid flow path and a width transverse to the fluid flow path. The width of the fluid conduit is greater than the length. A cryopumping array having an outer rim surrounding a central opening is positioned within the fluid conduit transverse to the fluid flow path such that the fluid flow path extends through the central opening of the array. The outer rim captures water vapor from the fluid flow path. The array has a transverse width and a rim width which are both greater than the thickness of the array. A conductive strut extends from the array through the fluid conduit transverse to the fluid flow path for a conductively coupling the array to a cryogenic cooling source which cools the array to cryogenic temperatures. | ||||||
| 282 | Recondensation of gaseous hydrocarbons | US849534 | 1997-07-28 | US5860294A | 1999-01-19 | Einar Brendeng |
| A method for condensation of gaseous hydrocarbons from a mixture of inert gas and gaseous hydrocarbons, particularly as found in storage tanks of an LPG/LEG ship. According to the method, the condensate and the cargo gas composition are heat exchanged with a part of its condensate, and with a cargo gas/inert gas mixture, which is to be released to the atmosphere or burned, in a separate condensation step. | ||||||
| 283 | Fluid cooled trap | US599622 | 1996-02-09 | US5820641A | 1998-10-13 | Youfan Gu; Dana S. Hauschultz |
| The liquid cooled trap for effectively and efficiently collecting condensable vapor in a chemical vapor reaction system includes two stages. The first stage includes an entrance area to the trap that is purposely designed to be large in space and a very poor heat exchanger in order to avoid condensation and resulting solid deposits that could clog the entrance port to the trap. The second stage comprises a better heat exchanger to spread the condensation and deposits efficiently over a larger surface area and a longer flow path. The second stage is a very efficient heat exchanger to clean up and remove whatever small amount of the condensable vapor remains after the first stage of the trap. The second stage includes cooling coil tubes and cooling cones or fins to increase the overall efficiency of the trap be increasing the interior surfaces upon which the flowing condensable vapor can condense, while not significantly reducing the flow conductance of the trap. | ||||||
| 284 | Throttle cycle cryopumping system for Group I gases | US615131 | 1996-03-14 | US5687574A | 1997-11-18 | Ralph C. Longsworth; Francis T. Lotz |
| A Group I gas cryopumping system includes a compressor throttle cycle refrigerator using mixed refrigerants. Cold refrigerant flows through a cryopumping surface located in a vacuum chamber, whereon vapor freezes. The refrigerant then passes through a heat exchanger in cross flow with refrigerant from the compressor. Refrigerant flow entering and leaving the heat exchanger is in uninsulated lines at substantially room temperature. All exposed cold lines are eliminated. The throttle device and cold cryopumping surface are an integral unit that connects directly to the flow paths of the heat exchanger without intermediate lines. The compressor/aftercooler unit may be located at any convenient distance from the heat exchanger and cryopumping surface, and the heat exchanger is located immediately adjacent to the pumping surface in a separate housing outside the vacuum chamber. The heat exchanger housing may share or be isolated from the vacuum of the vacuum chamber. Selected mixed refrigerants provide a wide range of cooling capacity over narrow, selectable temperature ranges. Thus, in a selected temperature range, gases are selectively collected to the exclusion of other gases. A tray collects liquid water from the cryopump surfaces during defrost. | ||||||
| 285 | Cryogenic system for producing nitrogen | US701372 | 1996-08-22 | US5638698A | 1997-06-17 | Mary Anne Knight; James Joseph Maloney |
| A system for processing nitrogen-containing effluent from an industrial process wherein the effluent is cooled and liquid nitrogen is added directly to the cooled effluent. The direct contact and heat exchange produces gaseous nitrogen and liquid organics which are both used to cool the effluent and are subsequently recovered. | ||||||
| 286 | Controlled multiple storage vessel gas trap | US653498 | 1996-05-24 | US5617727A | 1997-04-08 | Richard R. Zito |
| A gas trap having several independently controlled storage vessels (140,150). Access to each vessel is achieved via pneumatic valves (80,90), and these pneumatic valves are, in turn, controlled by solenoid valves (300, 380). The solenoid valves receive their electrical power from a relay system (520) which is controlled by a computer (550). | ||||||
| 287 | Thermal trap for gaseous materials | US923291 | 1992-07-30 | US5303558A | 1994-04-19 | Oscar L. Caton; Craig A. Bellows; Curtis M. Hebert, Jr.; Steve J. Schaper |
| A semiconductor deposition system with thermal trap characterized by a processing chamber, a source of process gas coupled to an inlet of the processing chamber, a thermal trap coupled to an outlet of the processing chamber, and a pump mechanism operative to pump a gas from the process chamber and into the thermal trap. The thermal trap preferably includes an enclosure defining a trap chamber, where an inlet to the trap chamber is coupled to the outlet of the processing chamber, a condensable-solid collection surface located within the trap chamber, a mechanism for maintaining the temperature of the collection surface at or below the temperature at which a gas flowing into the chamber condenses into a solid form, and a mechanism for maintaining the temperature of an inner surface of the enclosure at a temperature above which the gas condenses into a solid form. A method for trapping a gaseous material is characterized by the steps of flowing a gaseous material into a chamber of an enclosure, and maintaining the temperature of a collection surface disposed within the chamber at or below the temperature at which the gaseous material condenses into a solid form. The method preferably also includes the step of maintaining the temperature of an inner surface of the enclosure above the temperature at which the gaseous material condenses into a solid. | ||||||
| 288 | Cryo-mechanical vapor recovery apparatus | US871934 | 1992-04-21 | US5291751A | 1994-03-08 | Louis Perez; Glenn T. Sameshima; Robert J. Spencer |
| Hybrid cryo-mechanical apparatus is provided to collect condensable vapors from an incoming gas flow. The gas flow is refrigerated in a series of upstream mechanical refrigeration stages, and fed to an indirect contact heat exchanger suitable for operation with a cryogen refrigerant. Temperature of the cryogen leaving the heat exchanger is monitored, and is used to operate a control valve which throttles the heat exchanger output. | ||||||
| 289 | Cryogenic waterpump | US886721 | 1992-05-21 | US5261244A | 1993-11-16 | Philip A. Lessard; Douglas F. Aitken; Robert D. Bradford; Roland P. Graham; Steven A. Michaud; Karen J. Manning |
| A cold trap includes a set of baffles cooled by the cold finger of a closed cycle refrigerator. The baffles are vertically disposed in a vertical fluid conduit with frustoconical and conical surfaces for directing liquid to a circular trough during regeneration. After the liquid is collected, it is blown from the trough through a pressure relief valve by a nitrogen purge. The trough is formed in the upper surface of a connecting flange at the lower end of the fluid conduit. | ||||||
| 290 | Evacuation system and method therefor | US873175 | 1992-04-24 | US5259735A | 1993-11-09 | Kazue Takahashi; Shinjiro Ueda; Manabu Edamura; Naoyuki Tamura; Kazuaki Ichihashi |
| An evacuation system in an ultra-high vacuum sputtering apparatus capable of shortening the pumping time of the system. A main pump, composed of a turbo-molecular pump and a baffle is positioned upstream of a main pump and cooled to a temperature in which argon gas is not absorbed and only water is absorbed. The pump and a vacuum chamber are separated by a valve. A pipeline circulates a heating medium to rapidly heat and cool the vacuum chamber for enabling a gas discharge from the vacuum chamber whereby the pumping time can be reduced and the overall production of the system can be increased. | ||||||
| 291 | Cryostat vacuum chamber | US742389 | 1991-08-08 | US5207069A | 1993-05-04 | Koichiro Matsuda; Toshiya Itoh; Shoichiro Togitani; Etsuji Kawaguchi |
| In a cryostat vacuum chamber encompassing a refrigerator and a sample table cooled by the refrigerator, a heater is provided for controlling a temperature of the sample table, and the refrigerator is also provided with separate heaters. | ||||||
| 292 | Refrigerant recovery device | US651480 | 1991-02-06 | US5101637A | 1992-04-07 | Bernard E. Daily |
| A lightweight, portable, unmotorized apparatus for recovering condensable halocarbons is described. The device is comprised of two containers. The first container, which is substantially cryogenic, is adapted to hold refrigerant; this container is comprised of a valve and a refrigerant line. The refrigerant line from the first container is passed in contact with a second container, and the in such line is allowed to vent to an area of relatively low pressure. As the refrigerant is passed to the area of lower pressure, the second container is cooled. The second container is connected to a vessel, which contains the condensable gas to be recovered. | ||||||
| 293 | Multiple effect absorption refrigeration processes and apparatuses for use therein | US518077 | 1990-05-01 | US5061306A | 1991-10-29 | Chen-Yen Cheng |
| In a process of the present invention, a first water vapor at a is absorbed into a solution containing water and a non-volatile solute such as lithium bromide at substantially the same pressure but at a temperature that is higher than the pure water saturation temperature corresponding to the absorption pressure. The heat released in absorption is transmitted to a mass of pure water to generate a second water vapor at a second pressure that is substantially higher than that of the first vapor, therby diluting the absorbing solution. The absorption of first vapor, generation of second vapor and dilution of the absorbing solution are collectively referred to as a vapor pressure enhancement operation activated by dilution of the absorbing solution. The methods and apparatuses of the present invention may also be used in enhancing vapor pressure of a non-aqueous solvent. In one varation, the vapor pressure enhancement is accomplished across a vertical heat transfer wall provided with two falling liquid films. The film on one side is an absorbing solution while on the other is pure water. First vapor brought in contact with the absorbing solution is absorbed at substantially the same pressure but at a temperature higher than the pure water saturation temperature. The heat released is transmitted through the vertical heat transfer wall to vaporize water and generate second vapor at a second pressure that is higher than that of the first vapor. | ||||||
| 294 | Cryo-slammer | US284989 | 1988-12-15 | US5044165A | 1991-09-03 | John G. Linner; Stephen A. Livesey; Carmen Piunno; Mark Zaltsberg; Frank Gibson |
| A method and apparatus for ultrarapid cooling of tissue samples against a chilled cryogenic surface. The cryogenic surface is enclosed in a high vacuum chamber during cooling of the cryogenic surface. Dry non-condensable room temperature gas is introduced from an external source to raise the chamber pressure just prior to slamming or plunging a sample against the cryogenic surface. The cryogenic surface is heated for regeneration or cleaning purposes between each successive sample. | ||||||
| 295 | Apparatus for intermediate enrichment of trace substances from a gas stream in a cold trap, and chromatography arrangement provided therewith | US438078 | 1989-11-20 | US4992083A | 1991-02-12 | Klaus-Peter Mueller; Jochen Rudolph |
| For intermediate enrichment of trace substances from a gas stream, a cold ap is used which carries a flow and optionally contains an adsorbent material and which is surrounded by a gas-tight double-walled jacket into which cooling fluid from a surrounding cooling bath can penetrate via an extension tube at the bottom. For desorption, the cooling fluid is expelled from the double-walled jacket via compressed air and a valve control. A pipe loop connected to the double-walled jacket and having a heater winding and circulation pump allows rapid heating of the cold trap. A level control apparatus connected to the compressed-air line allows sensitive level adjustment in the bottom extension tube of the double-walled jacket during the desorption phase. Such a cold trap is advantageous, inter alia, in a chromatography arrangement with a separation column and fractionating column of high resolution and sensitivity. | ||||||
| 296 | Cracking traps for process gas components having a condensed phase | US196433 | 1988-05-20 | US4867952A | 1989-09-19 | John A. Baumann; Rozalie Schachter; Marcello Viscogliosi |
| Effluent process gases, particularly those employed in the production and processing of solid state electronic components, are cracked to form products having a condensed phase, which may be separated from the flowing process gas. A plasma trap comprises a high frequency coil for producing a plasma therein. The walls of the trap may be cooled and the trap may employ a removable wall on which the cracked product collects. Particular gases that may be treated are arsine, phosphine, disilane, silane, germane, organometallics and gases containing beryllium and boron. | ||||||
| 297 | Vacuum system with molecular flow line | US230573 | 1988-08-10 | US4860546A | 1989-08-29 | John T. Harvell; Philip A. Lessard |
| In a vacuum system having a load lock cooperating with a work chamber, a flow line is connected between the cryopump of the load lock and the work chamber. The flow line passes noncondensible gases which are not absorbed by the cryopump of the load lock to the work chamber 12 for absorption by the cryopump of the work chamber. Alternatively, the flow line is connected between the load lock cryopump and the cryopump of the work chamber for directly passing the noncondensible gases to the work chamber cryopump. The flow line prevents buildup of noncondensible gases within the cryopump of the load lock. The flow line may include baffles to damp pressure surges during cryopumping of the load lock. A control valve connected to the flow line allows operator control of the passing of noncondensible gases from the load lock cryopump to the work chamber or to the work chamber cryopump through the flow line. The dimensions of the flow line provide molecular flow of the noncondensible gases. | ||||||
| 298 | Refrigerant fluid trap for vacuum evaporators for the deposit of thin metal films | US71909 | 1987-07-10 | US4785638A | 1988-11-22 | Orazio Viscuso |
| A refrigerant fluid trap for a vacuum evaporator for depositing a thin metal film including a U-shaped structure for passage of refrigerant fluid, forming an interior space for trapping condensable vapors. In said interior space there is housed a titanium evaporation source. | ||||||
| 299 | Abatement of vapors from gas streams by solidification | US110845 | 1987-10-21 | US4769054A | 1988-09-06 | Frederic N. Steigman |
| A process for abatement of warm melting point vapors from gas streams is provided. The warm melting point vapors are solidified by direct contact with a chilled liquid, and are subsequently removed from the chilled liquid using known separation techniques. The chilled liquid exhibits a vapor pressure at the contacting temperature which is sufficiently low to preclude unsafe levels of the chilled liquid vapor in the processed gas stream. The chilled liquid is cooled using indirect heat exchange with a cryogenic liquid and is recycled. | ||||||
| 300 | Process for removing lighter volatile impurities from gases | US853234 | 1986-04-17 | US4755201A | 1988-07-05 | Manfred Eschwey; Werner Schleser |
| Lighter volative impurities are removed from gases by drawing the gas to be purified into a vacuum system. The gas to be purified deposits onto the cold surface of a condenser which is at cryogenic temperatures, while the lighter volatile impurities are continuously pulled out of the vacuum system in gaseous form. | ||||||
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