专利汇可以提供Automatic wafer loading and pre-alignment system专利检索,专利查询,专利分析的服务。并且An automatic wafer loading and pre-alignment system for integrated circuit wafer-mask Aligners. A belt feed track system is employed to transport wafers from a ''''send'''' wafer storage carrier to a wafer pre-alignment station. The wafer is mechanically pre-aligned with respect to the wafer chuck of the Aligner by means of a roller arm and flat-finder system. After completion of the pre-alignment process, the Aligner turntable is rotated to carry the pre-aligned wafer and chuck to the home position of the turntable and at the same time position another chuck at the pre-alignment station. If the new chuck at the prealignment station contains a wafer, the wafer is transported from the chuck to a ''''receive'''' wafer storage carrier by means of a belt return track system. The feed and return wafer belt track systems have a common portion between the pre-alignment station and the respective send and receive wafer storage carriers. Photosensors are used to detect the presence or absence of wafers at critical locations in the loading system and at the prealignment station.,下面是Automatic wafer loading and pre-alignment system专利的具体信息内容。
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